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1

Physical Model of Field Enhancement and Edge Effects of FinFET Charge-Trapping NAND Flash Devices

Tzu-Hsuan Hsu, Hang-Ting Lue, Ya-Chin King, Yi-Hsuan Hsiao, Sheng-Chih Lai, Kuang-Yeu Hsieh, Rich Liu, Chih-Yuan Lu

Journal:

IEEE Transactions on Electron Devices

Year:

2009

Language:

english

File:

PDF, 1.21 MB

english, 2009

2

Future challenges of flash memory technologies

Chih-Yuan Lu, Kuang-Yeu Hsieh, Rich Liu

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 509 KB

english, 2009

3

Etch Defect Characterization and Reduction in Hard-Mask-Based Al Interconnect Etching

Lee, Hong-Ji, Hung, Che-Lun, Leng, Chia-Hao, Lian, Nan-Tzu, Young, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan

Journal:

International Journal of Plasma Science and Engineering

Year:

2008

Language:

english

File:

PDF, 1.64 MB

english, 2008

4

I–V characteristics of polysilicon resistors at high electric field and the non-uniform conduction mechanism

Nicky Chau-Chun Lu, Chih-Yuan Lu

Journal:

Solid-State Electronics

Year:

1984

Language:

english

File:

PDF, 963 KB

english, 1984

5

Mechanisms and solutions to gate oxide degradation in flash memory by tunnel-oxide nitridation engineering

Szu-Yu Wang,, Chih-Yuan Chin,, Pei-Ren Jeng,, Ling-Wu Yang,, Ming-Shiang Chen,, Chi-Tung Huang,, Jeng Gong,, Kuang-Chao Chen,, Ku, J., Chih-Yuan Lu,

Journal:

IEEE Electron Device Letters

Year:

2005

Language:

english

File:

PDF, 621 KB

english, 2005

6

[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Methods of removing solvent-like residues from wafer backside bevel

Sheng-Yuan Chang,, Cheng-Yi Lung,, An Chyi Wei,, Hong-Ji Lee,, Nan-Tzu Lian,, Tahone Yang,, Kuang-Chao Chen,, Chih-Yuan Lu,

Year:

2013

Language:

english

File:

PDF, 1.19 MB

english, 2013

7

Generalized path-integral formalism of the polaron problem and its second-order semi-invariant correction to the ground-state energy

Luttinger, J. M., Lu, Chih-Yuan

Journal:

Physical Review B

Year:

1980

Language:

english

File:

PDF, 602 KB

english, 1980

8

Charge-based capacitance measurement for bias-dependent capacitance

Yao-Wen Chang,, Hsing-Wen Chang,, Tao-Cheng Lu,, Ya-Chin King,, Wenchi Ting,, Yen-Hui Joseph Ku,, Chih-Yuan Lu,

Journal:

IEEE Electron Device Letters

Year:

2006

Language:

english

File:

PDF, 157 KB

english, 2006

9

[IEEE 2011 22nd Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2011.05.16-2011.05.18)] 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Post etch killer defect characterization and reduction in a self-aligned double patterning technology

Lee, Hong-Ji, Lin, Sun-Yi, Lin, I-Ting, Wei, Kuo-Liang, Chang, Sheng-Yuan, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan

Year:

2011

Language:

english

File:

PDF, 542 KB

english, 2011

10

[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - A study of surface condensation defect improvement after cryogenic implantation

Yu-Min Lin,, Jung-Yi Guo,, Jeng-Hwa Liao,, Hsin-Ju Lin,, Jung-Yu Hsieh,, Ling-Wu Yang,, Tahone Yang,, Kuang-Chao Chen,, Chih-Yuan Lu,

Year:

2014

Language:

english

File:

PDF, 986 KB

english, 2014

11

Electric Field Induced Nitride Trapped Charge Lateral Migration in a SONOS Flash Memory

Liu, Yu-Heng, Jiang, Cheng-Min, Chen, Wei-Chun, Wang, Tahui, Tsai, Wen-Jer, Lu, Tao-Cheng, Chen, Kuang-Chao, Lu, Chih-Yuan

Journal:

IEEE Electron Device Letters

Year:

2017

Language:

english

File:

PDF, 752 KB

english, 2017

12

Improvement of cell reliability by floating gate implantation on 1Xnm NAND flash memory

Liao, Jeng-Hwa, Ko, Zong-Jie, Lin, Yu-Min, Lin, Hsing-Ju, Hsieh, Jung-Yu, Yang, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan

Journal:

Solid-State Electronics

Year:

2018

Language:

english

File:

PDF, 2.28 MB

english, 2018

13

[IEEE 2018 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Hsinchu, Taiwan (2018.4.16-2018.4.19)] 2018 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - RTN modulation by neighboring word-line Vt level in 1Xnm floating gate NAND strings

Cheng, C.C., Chen, Y.H., Wang, C.P., Cheng, C.H., Lee, C.W., Lin, T.W., Ku, S.H., Chang, Y.W., Tsai, W.J., Lu, T.C., Chen, K.C., Wang, Tahui, Lu, Chih-Yuan

Year:

2018

Language:

english

File:

PDF, 424 KB

english, 2018

14

[IEEE 2020 IEEE International Reliability Physics Symposium (IRPS) - Dallas, TX, USA (2020.4.28-2020.5.30)] 2020 IEEE International Reliability Physics Symposium (IRPS) - Introduction of Non-Volatile Computing In Memory (nvCIM) by 3D NAND Flash for Inference Accelerator of Deep Neural Network (DNN) and the Read Disturb Reliability Evaluation : (Invited Paper)

Lue, Hang-Ting, Hsu, Po-Kai, Wang, Keh-Chung, Lu, Chih-Yuan

Year:

2020

File:

PDF, 1.40 MB

2020

15

Dual gate oxide integrity improvement by implementing nitrogen implantation technology

Tuung Luoh, Jung-Yu Hsieh, Ling-Wuu Yang, Chi-Tung Huang, Kuang-Chao Chen, Henry Chung, Joseph Ku, Chih-Yuan Lu

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2005

Language:

english

File:

PDF, 248 KB

english, 2005

16

A novel channel-program–erase technique with substrate transient hot carrier injection for SONOS NAND flash application

Tzu-Hsuan Hsu, Ya Chin King, Jau-Yi Wu, Yen Hao Shih, Hang Ting Lue, Erh-Kun Lai, Kuang-Yeu Hsieh, Rich Liu, Chih-Yuan Lu

Journal:

Solid-State Electronics

Year:

2007

Language:

english

File:

PDF, 402 KB

english, 2007

17

Improvement of the properties and electrical performance on TiCl4-based TiN film using sequential flow chemical vapor deposition process

Ming-Da Cheng, Tuung Luoh, Chin-Ta Su, Ta-Hung Yang, Kuang-Chao Chen, Chih-Yuan Lu

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 897 KB

english, 2010

18

On the semi-insulating polycrystalline silicon resistor

Ming-Kwang Lee, Chih-Yuan Lu, Kun-Zen Chang, Chintay Shih

Journal:

Solid-State Electronics

Year:

1984

Language:

english

File:

PDF, 497 KB

english, 1984

19

Modeling and optimization of monolithic polycrystalline silicon resistors

Lu, N.C.-C., Gerzberg, L., Chih-Yuan Lu, Meindl, J.D.

Journal:

IEEE Transactions on Electron Devices

Year:

1981

Language:

english

File:

PDF, 1.48 MB

english, 1981

20

A Highly Punchthrough-Immune Array Architecture and Program Method for Floating-Gate NOR-Type Nonvolatile Memory

Wen-Jer Tsai, Tien Fan Ou, Cheng-Hsien Cheng, Chun-Yuan Lu, Huang, J.S., Yan, S.G., Cheng, C.C., Ping Hung Tsai, Hung, C.S., Chu, T.K., Yih, C.M., Tao Cheng Lu, Kuang-Chao Chen, Chih-Yuan Lu

Journal:

IEEE Transactions on Electron Devices

Year:

2011

Language:

english

File:

PDF, 1.36 MB

english, 2011

21

[IEEE 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (2006.7.3-2006.7.3)] 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Non-Volatile Memory Technology-Today and Tomorrow

Lu, Chih-yuan, Lu, Tao-cheng, Liu, Rich

Year:

2006

Language:

english

File:

PDF, 6.75 MB

english, 2006

22

[IEEE 2010 IEEE International Memory Workshop - Seoul, Korea (South) (2010.05.16-2010.05.19)] 2010 IEEE International Memory Workshop - A critical examination of 3D stackable NAND Flash memory architectures by simulation study of the scaling capability

Hsiao, Yi-Hsuan, Lue, Hang-Ting, Hsu, Tzu-Hsuan, Hsieh, Kuang-Yeu, Lu, Chih-Yuan

Year:

2010

Language:

english

File:

PDF, 595 KB

english, 2010

23

Study of charge trapping characteristics of SONOS with various trapping layers using gate-sensing and channel-sensing (GSCS) method

Liao, Jeng-Hwa, Lin, Hsing-Ju, Lue, Hang-Ting, Du, Pei-Ying, Hsieh, Jung-Yu, Yang, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan

Journal:

Solid-State Electronics

Year:

2013

Language:

english

File:

PDF, 1.55 MB

english, 2013

24

[IEEE Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 - Taiwan (5-8 July 2004)] Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743) - Relationship between AC stress and DC stress on tunnel oxides

Zous, N.K., Chen, Y.J., Chin, C.Y., Tsai, W.J., Lu, T.C., Chen, M.S., Lu, W.P., Tahui Wang,, Pan, S.C., Ku, J., Chih-Yuan Lu,

Year:

2004

Language:

english

File:

PDF, 192 KB

english, 2004

25

[IEEE 2013 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Suzhou, China (2013.07.15-2013.07.19)] Proceedings of the 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Investigation of chromium contamination induced TDDB degradation in MOSFET

Chih-Jen Hsiao,, An-Shun Teng,, Wei-Chuan Chang,, Yi-Yueh Chen,, Ming-Yi Lee,, Yuan-Shan Tsai,, Ta-Wei Lee,, Ding-Jang Lin,, Dai, Allen, Chih-Yuan Lu,

Year:

2013

Language:

english

File:

PDF, 538 KB

english, 2013

26

[IEEE 2011 22nd Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2011.05.16-2011.05.18)] 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Advanced floating gate CD uniformity control in the 75nm node NOR flash memory

Chang, Sheng-Yuan, Chen, Yu-Chung, Wei, An Chyi, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan

Year:

2011

Language:

english

File:

PDF, 298 KB

english, 2011

27

[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Robust shallow trench isolation technique used for 75nm nor flash memory

Liao, Jeng-Hwa, Wei, Kuo-Liang, Lee, Hong-Ji, Cheng, Chun-Min, Chiang, Chun-Ling, Hsieh, Jung-Yu, Yang, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan

Year:

2010

Language:

english

File:

PDF, 1.60 MB

english, 2010

28

Study of the Gate-Sensing and Channel-Sensing Transient Analysis Method for Monitoring the Charge Vertical Location of SONOS-Type Devices

Pei-Ying Du,, Hang-Ting Lue,, Szu-Yu Wang,, Erh-Kun Lai,, Tiao-Yuan Huang,, Kuang-Yeu Hsieh,, Liu, R., Chih-Yuan Lu,, Pei-Ying Du,

Journal:

IEEE Transactions on Device and Materials Reliability

Year:

2007

Language:

english

File:

PDF, 1.59 MB

english, 2007

29

Flash Devices

Hang-Ting Lue,, Sheng-Chih Lai,, Tzu-Hsuan Hsu,, Pei-Ying Du,, Szu-Yu Wang,, Kuang-Yeu Hsieh,, Liu, Rich, Chih-Yuan Lu,

Journal:

IEEE Transactions on Device and Materials Reliability

Year:

2010

Language:

english

File:

PDF, 1.44 MB

english, 2010

30

Atomically Thin Heterostructures Based on Single-Layer Tungsten Diselenide and Graphene

Lin, Yu-Chuan, Chang, Chih-Yuan S., Ghosh, Ram Krishna, Li, Jie, Zhu, Hui, Addou, Rafik, Diaconescu, Bogdan, Ohta, Taisuke, Peng, Xin, Lu, Ning, Kim, Moon J., Robinson, Jeremy T., Wallace, Robert M, M

Journal:

Year:

2014

Language:

english

File:

PDF, 1.64 MB

english, 2014

31

[IEEE Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 - Taiwan (5-8 July 2004)] Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743) - Reliability and device scaling challenges of trapping charge flash memories

Yeh, C.C., Tsai, W.J., Lu, T.C., Liao, Y.Y., Zous, N.K., Chen, H.Y., Tahui Wang,, Wenchi Ting,, Ku, J., Chih-Yuan Lu,

Year:

2004

Language:

english

File:

PDF, 217 KB

english, 2004

32

[IEEE 2013 e-Manufacturing & Design Collaboration Symposium (eMDC) - Hsinchu, Taiwan (2013.9.6-2013.9.6)] 2013 e-Manufacturing & Design Collaboration Symposium (eMDC) - FOUP N2 purge engineering in Fab

Yiting Kuo,, Howard Tsao,, Tuung Luoh,, Ling-Wu Yang,, Tahone Yang,, Kuang-Chao Chen,, Chih-Yuan Lu,

Year:

2013

Language:

english

File:

PDF, 955 KB

english, 2013

33

[IEEE 2012 e-Manufacturing & Design Collaboration Symposium (eMDC) - HsinChu, Taiwan (2012.09.4-2012.09.4)] 2012 e-Manufacturing & Design Collaboration Symposium (eMDC) - FOUP environment control and condense reduction

Kuo, Yiting, Tsao, Howard, Luoh, Tuung, Yang, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan

Year:

2012

Language:

english

File:

PDF, 392 KB

english, 2012

34

Improved Reliability Performances of SONOS-Type Devices Using Hot-Hole Erase Method by Novel Negative FN Operations

Yi-Hsuan Hsiao,, Hang-Ting Lue,, Yen-Hao Shih,, Erh-Kun Lai,, Kuang-Yeu Hsieh,, Liu, R., Chih-Yuan Lu,

Journal:

IEEE Transactions on Device and Materials Reliability

Year:

2008

Language:

english

File:

PDF, 822 KB

english, 2008

35

[IEEE 2009 IEEE International Electron Devices Meeting (IEDM) - Baltimore, MD, USA (2009.12.7-2009.12.9)] 2009 IEEE International Electron Devices Meeting (IEDM) - Reliability of barrier engineered charge trapping devices for sub-30nm NAND flash

Rich Liu,, Lue, Hang-Ting, Chen, K.C., Chih-Yuan Lu,

Year:

2009

Language:

english

File:

PDF, 760 KB

english, 2009

36

[IEEE 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2012) - Singapore, Singapore (2012.07.2-2012.07.6)] 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Anomalous single bit retention induced by asymmetric STI-corner-thinning for floating gate Flash memories

Lee, Ming-Yi, Hsiao, Wei-Hao, Chen, Ru-Ping, Kuo, Li-Kuang, Dai, Sheng-Qian, Ting, Rong-Cyuan, Chen, Chih-Lin, Chu, Da-Gang, Lu, Chih-Yuan

Year:

2012

Language:

english

File:

PDF, 420 KB

english, 2012

37

Average partition function of an electron in random binary alloy

Journal:

Physical Review B

Year:

1981

Language:

english

File:

PDF, 335 KB

english, 1981

38

Erratum: Average partition function of an electron in random binary alloy

Journal:

Physical Review B

Year:

1982

File:

PDF, 22 KB

1982

39

[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - A critical review of charge-trapping NAND flash devices

Hang-Ting Lue,, Sheng-Chih Lai,, Tzu-Hsuan Hsu,, Yi-Hsuan Hsiao,, Pei-Ying Du,, Szu-Yu Wang,, Kuang-Yeu Hsieh,, Liu, R., Chih-Yuan Lu,

Year:

2008

Language:

english

File:

PDF, 8.26 MB

english, 2008

40

Classical partition function of a rigid rotator or polyatomic gases

Journal:

American Journal of Physics

Year:

1983

Language:

english

File:

PDF, 527 KB

english, 1983

41

[IEEE 2011 IEEE International Electron Devices Meeting (IEDM) - Washington, DC, USA (2011.12.5-2011.12.7)] 2011 International Electron Devices Meeting - Multi-level 40nm WOX resistive memory with excellent reliability

Chien, Wei-Chih, Lee, Ming-Hsiu, Feng-Ming Lee,, Lin, Yu-Yu, Hsiang-Lan Lung,, Hsieh, Kuang-Yeu, Chih-Yuan Lu,

Year:

2011

Language:

english

File:

PDF, 3.04 MB

english, 2011

42

Dielectric resolution enhancement coating technology (DiRECT) - a sub-90 nm space and hole patterning technology using 248-nm lithography and plasma-enhanced polymerization

Ming-Chung Liang,, Hsin-Yi Tsai,, Chia-Chi Chung,, Cheng-Chen Hsueh,, Chung, H., Chih-Yuan Lu,

Journal:

IEEE Electron Device Letters

Year:

2003

Language:

english

File:

PDF, 353 KB

english, 2003

43

Ground-state energy of the optical polaron

Lu, Chih-Yuan, Shen, Chi-Kuang

Journal:

Physical Review B

Year:

1982

Language:

english

File:

PDF, 153 KB

english, 1982

44

A New String Decoding Scheme for Enhancing Array Block Efficiency of Vertical Gate Type (VG-Type) 3-D NAND

Yeh, Teng-Hao, Wu, Chen-Jun, Hu, Chih-Wei, Chen, Wei-Chen, Lue, Hang-Ting, Shih, Yen-Hao, King, Ya-Chin, Lu, Chih-Yuan

Journal:

IEEE Electron Device Letters

Year:

2015

Language:

english

File:

PDF, 961 KB

english, 2015

45

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 24 February 2013)] Optical Microlithography XXVI - SMO and NTD for robust single exposure solution on contact patterning for 40nm node flash memory devices

Yu, Chih-Chieh, Conley, Will, Yang, C. C., Yang, Elvis, Yang, T. H., Chen, K. C., Lu, Chih-Yuan

Year:

2013

Language:

english

File:

PDF, 557 KB

english, 2013

46

Impact of ${\hbox{V}}_{\rm pass} $ Interference on Charge-Trapping NAND Flash Memory Devices

Hsiao, Yi-Hsuan, Lue, Hang-Ting, Chen, Wei-Chen, Chang, Kuo-Pin, Tsui, Bing-Yue, Hsieh, Kuang-Yeu, Lu, Chih-Yuan

Journal:

IEEE Transactions on Device and Materials Reliability

Year:

2015

Language:

english

File:

PDF, 1.26 MB

english, 2015

47

Z-Interference and Z-Disturbance in Vertical Gate-Type 3-D NAND

Yeh, Teng-Hao Elton, Chen, Wei-Chen, Hsu, Tzu-Hsuan Bruce, Du, Pei-Ying Penny, Hsieh, Chih-Chang, Lue, Hang-Ting, Shih, Yen-Hao, King, Ya-Chin, Lu, Chih-Yuan

Journal:

IEEE Transactions on Electron Devices

Year:

2016

Language:

english

File:

PDF, 3.14 MB

english, 2016

48

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Metrology, Inspection, and Process Control for Microlithography XXV - Process solutions for reducing PR residue over non-planar wafer

Raymond, Christopher J., Lin, C. H., Huang, C. H., Yang, Elvis, Yang, T. H., Chen, K. C., Lu, Chih-Yuan

Year:

2011

Language:

english

File:

PDF, 687 KB

english, 2011

49

[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Novel hybrid 3D NAND flash memory containing vertical-gate and gate-all-around structures

Chung, Yao-An, Yang, Zusing, Chiu, Yuan-Chieh, Hong, Shih-Ping, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan

Year:

2016

Language:

english

File:

PDF, 746 KB

english, 2016

50

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Metrology, Inspection, and Process Control for Microlithography XXV - Wafer-edge defect reduction for tri-layer materials in BEOL applications

Raymond, Christopher J., Du, J. R., Huang, C. H., Yang, Elvis, Yang, T. H., Chen, K. C., Lu, Chih-Yuan

Year:

2011

Language:

english

File:

PDF, 1.86 MB

english, 2011

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